Session 26: Sensors, MEMS, and BioMEMS N/MEMS for Physical, Chemical, and Bio-sensing

Wednesday, December 7, 9:00 a.m.
Continental Ballroom 1-3
Co-Chairs: Maryam Ziaei, Isono Health
Marc Faucher,IEMN-CNRS

9:05 AM
26.1 Solid State pH and Chloride Sensor with Microfluidic Reference Electrode, M. Zevenbergen, G. Altena, V. A. Dam, M. Goedbloed, P. Bembnowicz, P. McGuinness*, H. Berney*, A. Berduque*, T. O’Dwyer* and R. van Schaijk,, Holst Centre/imec, *Analog Devices Inc.

We present for the first time a miniaturized multi ion-selective sensor to simultaneously determine pH and chloride (Cl-) levels in fluid. The sensor combines solid state iridium oxide (IrOx) and silver chloride (AgCl) electrodes fabricated on a Si substrate with a microfluidic reference electrode (RE). The drift of the RE is similar to a standard RE while the internal reservoir is orders or magnitude smaller. The drift rate depends on the RE geometry as predicted by a model based on diffusion. The sensitivity, response time and accuracy were determined using solution with known composition, household solutions and samples of sweat and saliva. Overall performance is similar or even exceeds standard, relatively large and expensive ion-selective sensors.

9:30 AM
26.2 Fast Spintronic Thermal Sensor for IC Power Driver Cooling Down, Y. Jiang, Y. Zhang, A. Klemm and J.-P. Wang, University of Minnesota

A novel thermal sensor is designed and fabricated based on spin-transfer torque operated magnetic tunnel junction (STT-MTJ) device. It can fulfill thermal detection and overheat protection on integrated circuit. Moreover, it shows over 10 times faster thermal transit response speed than that of traditional CMOS thermal sensor. The unique property is really helpful for controlling integrated circuit’s temperature due to heating by leakage current. A power driver at full loading situation is used to demonstrate this design. It shows that the sensor can be adopted as adaptive manner in a power source scaling strategy to cool down the IC in an effective way, showing a promising potential application not only as discrete sensor, but also as power solution for IC driver.

9:55 AM
26.3 Encapsulated Inertial Systems (Invited), C.H. Ahn, D.L. Christensen, D.B. Heinz, V.A. Hong, E. J. Ng, J. Rodriguez, Y. Yang, G. O’Brien and T. Kenny, Stanford University

There is significant interest in integration of multiple MEMS functionalities into a single compact device. Our group has developed a wafer-scale encapsulation process that provides an ultraclean, stable environment for operation of MEMS timing references, which has been commercialized by SiTime, Inc. In this paper, we discuss some of the issues associated with incorporation of inertial sensors into this encapsulation process, including design constraints, stiction, pressure, and other issues.

10:20 AM
26.4 Triboelectric Energy Harvester with an Ultra-Thin Tribo-Dielectric Layer by Initiated CVD and Investigation of Underlying Physics in the Triboelectricity, D. Kim, W.-G. Kim, I. K. Jin, H. Park, M. J. Kwak, S. G. Im, and Y.-K. Choi, Korea Advanced Institute of Science and Technology (KAIST)

A thickness effect of a tribo-dielectric layer (TDL) made of ultra-thin polymer in a triboelectric energy harvester (TEH) is experimentally and comprehensively studied. The TDL was deposited by the initiated chemical vapor deposition (i-CVD) method and its thickness was precisely controlled to analyze the thickness effect. The correlation between the thickness of the TDL and the output performance is experimentally determined and analytically understood with the aid of the dynamic contact-separation model. In contrast to the conventional static contact-separation model, in this case the output performance increases as the thickness of the TDL increases owing to the dynamic behavior of the electron, which includes drift and recombination phenomenon in the TDL.

10:45 AM
26.5 GaN-on-Si μLED Optoelectrodes for High-spatiotemporal-accuracy Optogenetics in Freely Behaving Animals, K. Kim, D. English*, S. McKenzie*, F. Wu, E. Stark*, J. Seymour, P.-C. Ku, K. Wise, G. Buzsaki* and E. Yoon, University of Michigan, *New York University

We present the micromachined GaN-on-Si μLED optoelectrodes with neuron-sized LEDs monolithically integrated on thin-and-narrow silicon shanks for optical stimulation and electrical recording in a behaving animal. In vivo validation of the fabricated optoelectrode confirmed the successful light-induced modulation of neuronal activities in hippocampus with 100-ms long square optical pulses.

11:10 AM
26.6 Observation of Acoustoelectric Effect in Micromachined Lamb Wave Delay Lines with AlGaN/GaN Heterostructure, H. Zhu, A. Ansari, W. Luo and M. Rais-Zadeh, University of Michigan

We report on the first time observation of acoustoelectric (AE) effect from the interaction of acoustic Lamb waves and two-dimensional electron gas (2DEG) in an AlGaN/GaN heterostructure. Micro-fabricated Lamb wave delay lines are used to launch and guide travelling acoustic waves through the 2DEG region, resulting in a DC current flow between two ohmic contacts positioned on the delay line. The Lamb wave delay line shows much better acoustic transmission efficiency than the conventional surface acoustic wave (SAW) counterpart. The dependence of AE current on RF power and frequency is also verified.

11:35 AM
26.7 A 1 MHz 4 ppm CMOS-MEMS Oscillator with Built-In Self-Test and Sub-mW Ovenization Power, C.-Y. Liu, M.-H. Li, R. Ganesh and S.-S. Li, National Tsing Hua University

A 1 MHz 4 ppm temperature-stable micro-oven (uOven) controlled monolithic CMOS-MEMS oscillator has been demonstrated in this work, exhibiting heating power in sub-mW across the 100°C temperature span. The proposed novel isothermal uOven platform consists of dual heaters and a resistive temperature detector (RTD) for built-in self-test (BIST) and local resonator temperature monitoring.

12:00 PM
26.8 Sub-50 mV NEM Relay Operation Enabled by Self-Assembled Molecular Coating, B. Osoba, B. Saha, J. Edgington, L. Dougherty, C. Qian, F. Niroui*, J. Lang*, V. Bulovic*, J. Wu and T.-J. King Liu, University of California, Berkeley, *Massachusetts Institute of Technology

Sub-50 mV operation of nano-electro-mechanical relays is demonstrated for the first time, enabled by an anti-stiction molecular coating. Specifically, self-assembled perfluorodecyltriethoxysilane (PFDTES) is shown to be effective for reducing the switching hysteresis voltage of a relay, without dramatically increasing its ON-state resistance, enabling stable device operation at very low voltages.