IEDM

Session 18: Sensors, MEMS, and BioMEMS Enhanced Sensing, Heterogeneous Integration and Wearables

Tuesday, December 6, 2:15 p.m.
Continental Ballroom 1-3
Co-Chairs: Debbie Senesky, Stanford University
Severine Le Gac, University of Twente

2:20 PM
18.1 Highly Improved Response and Recovery Characteristics of Si FET-type Gas Sensor Using Pre-bias, J. Shin, Y. Hong, M. Wu, Y. Jang, J. S. Kim, B.-G. Park, C. S. Hwang and J.-H. Lee, Seoul National University

By adopting a new pulse pre-bias (Vpre) scheme, the response and recovery characteristics is significantly improved in Si field-effect transistor (FET)-type gas sensor having ZnO film as a sensing layer. A target gas of NO2, which is one of oxidizing gases, is detected by the FET- type sensor at various Vpres. It is demonstrated that a negative Vpre (-3 V) improves the response by ~2.5 times and a positive Vpre (4 V) reduces the recovery time by ~9 times in 0.5 ppm NO2 ambience at 180 oC. The mechanism responsible for the pre-bias effect is explained using energy band diagram.

2:45 PM
18.2 Graphene-gate Transistors for Gas Sensing and Threshold Control, N. Harada, K. Hayashi, M. Kataoka, J. Yamaguchi, M. Ohtomo, M. Ohfuchi, I. Soga, D. Kondo, T. Iwai and S. Sato, Fujitsu Laboratories Ltd.

Graphene was employed as gate electrodes of silicon transistors. When gas molecules adsorb on an exposed graphene gate, its work function changes, shifting the transistor threshold. This graphene-gate sensor exhibited excellent sensitivities, detecting 7-ppb NO2. Furthermore, the intentional doping of the graphene gate successfully shifted the threshold by 620 mV.

3:10 PM
18.3 Tunable and Wearable High Performance Strain Sensors Based on Laser Patterned Graphene Flakes, L.-Q. Tao, D.-Y. Wang, H. Tian, Z.-Y. Ju, Y. Liu, Y.-Q. Chen, Q.-Y. Xie, H.-M. Zhao, Y. Yang and T.-L. Ren, Tsinghua University, *USC

Tunable and wearable strain sensors based on laser patterned graphene flakes (LPGF) are demonstrated in this paper. The performance can be adjusted by laser patterning, resulting in a preferable gauge factor (up to 457) or strain range (over 100%), both of which are significantly higher than most state-of-the-art graphene strain sensors. These tunable strain sensors will have great potentials in health care, voice recognition, gesture control and many other areas.

3:35 PM
18.4 Thinnest Transparent Epidermal Sensor System Based on Graphene, S. K. Ameri, R. Ho, H. Jang, Y. Wang, D. Schnyer, D. Akinwande and N. Lu, University of Texas at Austin

We report the first transparent graphene-based epidermal sensor with thickness below 500 nm for measuring skin temperature, hydration and electrophysiological signals (ECG, EEG, EMG). Graphene epidermal sensor affords the ultimate conformability to skin and can be laminated like a dry tattoo without any adhesive for simultaneous electrical and optical sensing.

4:00 PM
18.5 Heterogeneously-Integrated Microdevices (Invited), S. Tanaka, Tohoku University

The integration of heterogeneous components or materials is a promising approach to create more functionalized, higher performance and smaller devices. However, there are technical problems in terms of process temperature limit, thermal expansion mismatch, process incompatibility, die size mismatch etc. To overcome such problems, significant efforts have been made in the world. This paper introduces two approaches, wafer bonding and film transfer, which have been developed in our group.

4:25 PM
18.6 A CMOS-compatible Large-Scale Monolithic Integration of Heterogeneous Multi-Sensors on Flexible Silicon for IoT Applications, J. Nassar, G. Torres Sevilla, S. Velling*, M. D. Cordero, M. Hussain, King Abdullah University of ScienceTechnology (KAUST), *University of Waterloo

We report CMOS technology enabled fabrication and system level integration of flexible bulk silicon (100) based multi-sensors platform which can simultaneously sense pressure, temperature, strain and humidity under various physical deformations. We also show an advanced wearable version for body vital monitoring which can enable advanced healthcare for IoT applications.

4:50 PM
18.7 Sensors and Haptics Technologies for User Interface Design in Wearables (Invited), R. Baskaran and G.C. Dogiamis, Intel Corporation

In this paper, a summary of various sensory technologies and interactions within them in wearable platforms is presented. In the first part of the paper, we discuss the way humans perceive various sensory inputs. Then, we review today’s state of art sensor technologies for user interfaces, followed by discussions on opportunities uniquely enabled by the wearable form factor.